JPH0533012Y2 - - Google Patents
Info
- Publication number
- JPH0533012Y2 JPH0533012Y2 JP586088U JP586088U JPH0533012Y2 JP H0533012 Y2 JPH0533012 Y2 JP H0533012Y2 JP 586088 U JP586088 U JP 586088U JP 586088 U JP586088 U JP 586088U JP H0533012 Y2 JPH0533012 Y2 JP H0533012Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- sub
- plate
- vacuum
- mounting table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 84
- 239000004065 semiconductor Substances 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP586088U JPH0533012Y2 (en]) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP586088U JPH0533012Y2 (en]) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112048U JPH01112048U (en]) | 1989-07-27 |
| JPH0533012Y2 true JPH0533012Y2 (en]) | 1993-08-23 |
Family
ID=31209601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP586088U Expired - Lifetime JPH0533012Y2 (en]) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533012Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2009549A (en) * | 2011-10-27 | 2013-05-07 | Asml Netherlands Bv | Lithographic apparatus and substrate handling method. |
-
1988
- 1988-01-22 JP JP586088U patent/JPH0533012Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01112048U (en]) | 1989-07-27 |
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